Alignment and integration of slumped glass x-ray mirrors at MPE
Proceedings of SPIE(2014)
摘要
This paper provides an update on the current activities for alignment and integration of slumped glass x-ray mirrors at MPE. Progress is being made w.r.t. the integration facility which is currently transitioned from a manual bench top setup to a full scale robotic system based on a high precision hexapod and collimated beam metrology. We present the most importantd design considerations and features of this new sytem as well as progress on other details of the integration concept.
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关键词
electronic test equipment,metrology
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