TiN layer structures for semiconductor devices, methods of forming the same, semiconductor devices having TiN layer structures and methods of fabricating the same Hoki Lee,Kwangjin Moon,Hyunsu Kim, Sungtae Kim,Sangwoo Lee, Eunok Leemag（2007）引用 23|浏览1暂无评分AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
