Deep submicron LOCOS-defined SOI photonic wire waveguides

Andrew W Tam,Marc Ibrahim,B Lamontagne,N Garry Tarr,Winnie N Ye,Siegfried Janz,Danxia Xu

international conference on group iv photonics（2011）

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摘要

The LOCOS technique for formation of SOI optical waveguides has been extended to produce low-loss photonic wire channel waveguides with deep submicron dimensions using a very simple process.

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关键词

optical waveguide,photonics,locos,optical waveguides,optical sensor,surface wave,silicon,silicon on insulator

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