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(Invited) Advanced Dielectrics Targeting 2X DRAM MIM Capacitors

M. Popovici,J. Swerts,M. Aoulaiche,A. Redolfi,B. Kaczer,M. -S. Kim,B. Douhard,A. Delabie,S. Clima,M. Jurczak,S. Van Elshocht

ECS Transactions（2013）

Cited 0|Views21
Key words
High-k Dielectrics,Dielectric Breakdown,Double-Gate Transistors,Field-Effect Transistors,High-Performance Nanoscale Devices
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