POLYIMIDE PRECURSOR, PHOTOSENSITIVE RESIN COMPOSITION CONTAINING SAID POLYIMIDE PRECURSOR, AND CURED-PATTERN-FILM MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE USING SAID PHOTOSENSITIVE RESIN COMPOSITION

Tetsuya Enomoto, Keishi Ono,Masayuki Ohe,Keiko Suzuki, Kazuya Soejima, Etsuharu Suzuki

mag(2015)

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