A highly integrated and low-power sno2 gas sensor cell for the detection of gas mixture

Chong Xing,Dongcheng Xie,Yan Zhang, Di He,Yujie Yang, Liang Geng, Qiuju Wu, Dongting Yao,Dongliang Chen,Lei Xu

2024 IEEE 37TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS(2024)

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摘要
This study reports a highly integrated and low-power temperature-modulated gas sensor cell aimed at detecting mixed gases. This design of six channels with a shared common grounded terminal ensures independent detection capability for each channel while reducing the usage of electrode pads, thereby enhancing device integration. Additionally, the six channels share a single heater but operate at different heating temperatures, enabling certain gas recognition capabilities. By investigating the response of the sensor cell to three food-related gases introduced in different sequences, this preliminary research has laid the foundation for modeling the response of the sensor cell to mixed gases. The developed model achieved a matching accuracy of 94.8% between its predicted results and the actual response, suggesting its potential for reliable gas mixture detection.
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关键词
Gas Sensor,Gas Mixture,Low Power
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