A highly integrated and low-power sno2 gas sensor cell for the detection of gas mixture
2024 IEEE 37TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS(2024)
摘要
This study reports a highly integrated and low-power temperature-modulated gas sensor cell aimed at detecting mixed gases. This design of six channels with a shared common grounded terminal ensures independent detection capability for each channel while reducing the usage of electrode pads, thereby enhancing device integration. Additionally, the six channels share a single heater but operate at different heating temperatures, enabling certain gas recognition capabilities. By investigating the response of the sensor cell to three food-related gases introduced in different sequences, this preliminary research has laid the foundation for modeling the response of the sensor cell to mixed gases. The developed model achieved a matching accuracy of 94.8% between its predicted results and the actual response, suggesting its potential for reliable gas mixture detection.
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关键词
Gas Sensor,Gas Mixture,Low Power
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