Carbon Nanotube Technologies For Future Ulsi Via Interconnects

Yuji Awano,Mizuhisa Nihei,Shintaro Sato,Akio Kawabata,Daiyu Kondo,Mari Ohfuti,Naoki Yokoyama

QUANTUM SENSING AND NANOPHOTONIC DEVICES II（2005）

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摘要

We demonstrate the advantages of carbon nanotubes (CNTs) for ULSI interconnections, which we believe that it must be one of the most promising applications for metallic carbon nanotubes. We report present status of CNT material technologies and the potential of metallic CNT vias for future ULSI interconnections.

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关键词

carbon nanotube, LSI interconnect, via, chemical vapor deposition

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