DUAL SHALLOW TRENCH ISOLATION (STI) FIELD EFFECT TRANSISTOR (FET) AND METHODS OF FORMINGNatalie B Feilchenfeld, Max G Levy, Richard A Phelps, Santosh Sharma,Yun Shi,Michael J Zierakmag(2014)引用 21|浏览4暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要