Nanometer-Scale Surface Element Analysis Using Laser Ablation Atomic Fluorescence Spectroscopy

Using the ultraviolet laser ablation, a very thin layer removal of a polymer and a glass was possible by single laser shot. Element analysis with nanometer-scale resolution was demonstrated for polymethyl methacrylate sample in combination with the laser-induced fluorescence spectroscopy. Nanometer-scale removal was also possible for silicon and metals by femtosecond laser ablation.