Directed Assembly Nanolithography
NANOLITHOGRAPHY: THE ART OF FABRICATING NANOELECTRONIC AND NANOPHOTONIC DEVICES AND SYSTEMS（2014）
摘要
Directed assembly is a promising nanolithography to produce a complex structure with small feature size. The chapter first discusses block copolymer lithography to realize the full potential of self-assembled structure. Secondly, programmable three-dimensional lithography using focused-ion-beam and electron-beam chemical-vapor-deposition is described.
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关键词
directed assembly,directed self-assembly,block copolymer,three-dimensional lithography
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