Fabrication of Resonator-Quantum Well Infrared Photodetector (RQWIP) with 10.2 Μm Cutoff
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE（2015）
关键词
QWIP,resonance,FPA,quantum efficiency,inductively coupled plasma etching,GaAs substrate removal,selective ICP etching
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