On Chip Test Structure For Fabrication Error Estimation Based On A Sequence Of Coupled Resonators

M. Borghi,M. Mancinelli,J. M. Fedeli,L. Pavesi

2015 IEEE 12TH INTERNATIONAL CONFERENCE ON GROUP IV PHOTONICS (GFP)（2015）

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摘要

We report on the realization of an on chip test structure which quantifies the degree of fabrication error of a photolithographic process. The device is based on a sequence of coupled resonators and allows performing a direct on chip test measurement.

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关键词

chip test structure,fabrication error estimation,coupled resonators,photolithographic process,direct on chip test measurement

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