Advanced Heterogeneous Integration Of Inp Hbt And Cmos Si Technologies For High Performance Mixed Signal Applications

Augusto Gutierrez-Aitken, Patty Chang-Chien, Wen Phan,Dennis Scott,Bert Oyama,Randy Sandhu,Joe Zhou,Peter Nam,Kelly Hennig, Matthew Parlee, Ben Poust,Khanh Thai, Craig Geiger,Aaron Oki,Reynold Kagiwada

2009 IEEE/MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM, VOLS 1-3（2009）

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摘要

Northrop Grumman Space Technology (NGST) is developing an Advanced Heterogeneous Integration (AHI) process to integrate III-V semiconductor chiplets on CMOS wafers under the Compound Semiconductor Materials on Silicon (COSMOS) DARPA program. The objective of the program is to have a heterogeneous interconnect pitch and length less than 5 um to enable intimate transistor scale integration. This integration will enable significant improvement in ADC dynamic range and bandwidth

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关键词

Analog-digital conversion,CMOSFETs,Heterojunction bipolar transistors,Heterogeneous Integration

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