New Applications And Emerging Technologies In Nanolithography
NANOLITHOGRAPHY: THE ART OF FABRICATING NANOELECTRONIC AND NANOPHOTONIC DEVICES AND SYSTEMS（2014）
关键词
rectenna, energy harvester, IR detector, MIM junction/diode, tunneling, junction/diode resistance, junction/diode capacitance, tunneling oxide/barrier, tunnel junction/diode, current-voltage asymmetry, geometric asymmetry, rectification, EBL, lift-off, parasitic impedance, Antenna Coupled Metal Insulator Metal (ACMIM), Mid-IR, Terahertz, cut-off frequency, RC time constant, Geometric decoupling, Nonlinearity, Sensitivity, Responsivity, Quantum efficiency, Antenna efficiency, Impedance matching, Bow-tie antenna, Finite Element Method, AC harmonic simulations, E-field enhancement, Nickel, IR imaging
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