Structural and morphological behavior of bismuth thin films grown through DC-magnetron sputtering

espanolEn este trabajo se depositaron peliculas delgadas de bismuto sobre sustratos de vidrio mediante la tecnica de sputtering con magnetron DC y se evaluaron los efectos de la temperatura del sustrato en la microestructura de las peliculas. El comportamiento estructural se analizo mediante difraccion de rayos X, mostrando una notable influencia de la temperatura del sustrato en el tamano de cristalito y microestres. La morfologia evaluada por medio de imagenes de la microsonda electronica, presento una leve diferencia en el tamano de grano con el incremento de la temperatura asi como un significativo incremento de la rugosidad superficial, segun medidas de perfilometria. EnglishBismuth thin films were grown onto glass substrates through the DC magnetron sputtering technique. The effects of substrate temperature on the microstructure of the films were evaluated. The structural behavior was analyzed via X-ray diffraction, and it showed a marked influence of the substrate temperature on the crystallite size and the micro-stress. The morphologies evaluated through Electron Probe Micro-analyzer images indicated a slight difference in the grain size with an increase in temperature as well as a significant increase in surface roughness, according to profilometer measurements.