THERMALLY STABLE HIGH-K TETRAGONAL HFO2 LAYER WITHIN HIGH ASPECT RATIO DEEP TRENCHESMichael P Chudzik, Bachir Dirahoui, Rishikesh Krishnan,S Krishnan,Ohjung Kwon,Paul C Parries, Hongwen Yanmag(2015)引用 23|浏览1暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要