Toward High-Performance Quality Meeting IC Device Manufacturing Requirements with AZ SMART DSA Process
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE（2015）
Key words
block co-polymer,directed self-assembly,BCP,DSA,poly(styrene-b-methylmethacrylate),PS-b-PMMA,SMART (TM),LER,LWR,CDU
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