Film Bulk Acoustic Resonators for Parallel Mass Sensing

This paper describes the principle of array sensing with film bulk acoustic resonators (FBARs) for combinatory mass sensing and the use of the arrayed FBAR resonant mass sensor for parallel detection of protein-ligand reactions in liquid environment. Various ligands were immobilized on the gold layer on the FBAR’s sensing surface for selective protein detection. The FBARs of the arrayed FBAR were fabricated to have different resonant frequencies from one another by adding slightly varied amount of mass loading on the resonators. Results showed that the arrayed FBAR could detect specific bindings on its surfaces as the concentration of the target ligand was varied.