Stress, microstructure and thermal-elastic properties of evaporated thin MgF 2 - films

Roland Thielsch,J Heber,Torsten Feigl,Norbert Kaiser

Optical Interference Coatings (2004), paper ThE6（2004）

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摘要

Mechanical stress, microstructure and thermal-elastic properties of thin evaporated MgF2 films were studied in dependence on substrate temperature. Data on biaxial modulus and coefficient of thermal expansion of 50nm thick films are presented.

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thin films

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