Ta2O5 and SiO2 films deposited by dual ion beam system with ECR source Changyeng Huang, M C Shih, Dongyang Lin, M S Wu,Chi Shih Chang, J H Dai, Fang C Homag（2001）引用 0|浏览1暂无评分关键词thin filmsAI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
