Impact of Different Levels of Detail in Atomic Metal Plasma Chemistry on Multidimensional Plasma Equipment Models Peter L G Ventzek,Shahid Rauf, V S Arunachalam, A V Eletskii, A V Astapenko, M V Golubkov,Vladislav S Golubkov,Vladislav Yu Kudryamag（2000）引用 23|浏览9暂无评分关键词level of detail,low pressure,electron impact,cross sectionAI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
