Energy Dependence On Crystalline Growth Of Aluminum Nitride Films Prepared By Ion Beam And Vapor Deposition MethodKiyoshi Ogata,Satoshi Nishiyama,Akinori Ebe, Yasutaka Andoh,Fuminori FujimotoION BEAM MODIFICATION OF MATERIALS(1996)引用 1|浏览6暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要