Mems Packaging Using Precision Machined Ltcc Substrates

V Heikkinen,Janne Aikio,Teemu Alajoki,Jussi Hiltunen, A J Matilla,Jyrki Ollila,Pentti Karioja

2003 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS（2003）

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关键词

integrated circuit packaging,band pass filters,silicon,bandpass filter,micromachining,tunable diode laser,semiconductor lasers,surface micromachining,fabry perot interferometer,optical filters

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