Design of a Large-Area, Transformer Coupled Plasma SourceYong Seok Hwang, Hwan Kim,Kyung Hoon Han,Nam Sik Yoonmag(1997)引用 23|浏览1暂无评分关键词radio frequency,impedance matching,high throughput,copper,plasma processingAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要