Lateral undercut of metal gate in SOI deviceSuman Datta,Justin K Brask,Jack Kavalieros,Brian S Doyle,Gilbert Dewey,Mark L Doczy,Robert S Chaumag(2008)引用 31|浏览3暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要