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Opportunities and Challenges of Finfet As A Device Structure Candidate for 14nm Node Cmos Technology

T. Yamashita,V. S. Basker,T. Standaert,C-C Yeh,J. Faltermeier,T. Yamamoto,C-H Lin,A. Bryant,K. Maitra,P. Kulkarni,S. Kanakasabapathy,H. Sunamura,J. Wang,H. Jagannathan,A. Inada,J. Cho,R. Miller,B. Doris,V. Paruchuri,H. Bu,M. Khare,James O'Neill,E. Leobandung

CHINA SEMICONDUCTOR TECHNOLOGY INTERNATIONAL CONFERENCE 2011 (CSTIC 2011)（2011）

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