Establishing A Moems Process To Realise Microshutters For Coded Aperture Imaging Applications

Mark E Mcnie,R R Davies, Ashley C Johnson, N W Price,C R Bennett,Christopher W Slinger, B Hardy, Greg Hames, Demaul Monk,Stanley Rogers

UNCONVENTIONAL IMAGING, WAVEFRONT SENSING, AND ADAPTIVE CODED APERTURE IMAGING AND NON-IMAGING SENSOR SYSTEMS（2011）

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Key words

Coded Aperture Imaging (CAI), micro-opto-electro-mechanical systems (MOEMS), micro-electromechanical systems (MEMS), microshutter array, transmissive optical modulator, Fabry-Perot, infra red (IR), polysilicon micromachining

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