Semiconductor memory used especially as a chain-FeRAM memory has capacitor devices each vertically extending from a substrate and/or a passivating region and/or a surface regionBruchhaus Rainer, Enders Gerhard,Hartner Walter, Kroenke Matthias,Mikolajick Thomas,Nagel Nicolas, Roehner Michaelmag(2003)引用 23|浏览1暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要