A MEMS nanopositioner with thermal actuator and on-chip thermal sensor | NOVA. The University of Newcastle's Digital RepositoryYong Zhu,S O Reza Moheimani,Mehmet Rasit Yucemag(2010)引用 23|浏览6暂无评分关键词novaAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要