CREATION OF MAGNETIC FIELD (VECTOR POTENTIAL) WELL FOR IMPROVED PLASMA DEPOSITION AND RESPUTTERING UNIFORMITYLiqi Wu,Ishtak Karim, Huatan Qiu,Kiejin Park,Chunming Zhou,Karthik Colinjivadimag(2012)引用 23|浏览1暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要