Bipolar transistor in VESTIC technology: prototype

Piotr Mierzwinski,Wieslaw Kuzmicz,Krzysztof Domanski,Daniel Tomaszewski, Grzegorz Gluszko

Proceedings of SPIE(2016)

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摘要
VESTIC technology is an alternative for traditional CMOS technology. This paper presents first measurement data of prototypes of VES-BJT: bipolar transistors in VESTIC technology. The VES-BJT is a bipolar transistor on the SOI substrate with symmetric lateral structure and both emitter and collector made of polysilicon. The results indicate that VES-BJT can be a device with useful characteristics. Therefore, VESTIC technology has the potential to become a new BiCMOS-type technology with some unique properties.
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关键词
semiconductor devices,bipolar transistor,polysilicon,VESTIC,VES-BJT,SOI
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