High Frequency Columnar Silicon Microresonators For Mass Detection
APPLIED PHYSICS LETTERS(2008)
摘要
A simple but effective technological scheme for the fabrication of high frequency silicon columnar microresonators is presented. With the proposed technique the dimensions of the microresonators are controlled on a scale of at least 1 mu m. Characterization of the mechanical properties of silicon columns gave resonant frequencies of the lowest flexural mode of 3-7 MHz with quality factors of up to 2500 in air and similar to 8800 under vacuum condition. Columnar microresonators were operated as mass balance with a sensitivity of 1 Hz/fg. A mass detection limit of 25 fg was deduced from experiments. (C) 2008 American Institute of Physics.
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关键词
detection limit,high frequency,mass balance,quality factor,resonant frequency
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