Molecular-Beam Epitaxy Of High-Quality Znse Homo-Epitaxial Layers On Solid-Phase Recrystallized Substrates

APPLIED PHYSICS LETTERS(1996)

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摘要
We study through reflection high-energy electron diffraction (RHEED) and low-temperature photoluminescence (PL) spectroscopy the molecular-beam epitaxy of ZnSe homoepitaxial layers on solid-phase recrystallized substrates. We show that with a proper ex situ substrate polishing a two-dimensional (2D) RHEED pattern is readily observed when introducing the substrate into the growth chamber at low temperature. We demonstrate that the in situ pre-growth treatment has a dramatic influence on ZnSe nucleation and that a suitable preparation leads to direct 2D growth of ZnSe layers which exhibit superior optical properties. The PL spectra are dominated by the near-band edge emission, with no deep-level and defect-related Lines. (C) 1996 American Institute of Physics.
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zinc,molecular beam epitaxy
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