Microfabrication Of Circuits For Magnetic Bubbles Of Diameter 1-Mum And 2-Mum

R K Watts,H M Darley, J Kruger,T G Blocker, D C Guterman, J T Carlo,D C Bullock, M S Shaikh

APPLIED PHYSICS LETTERS（1976）

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摘要

We describe microfabrication techniques for Permalloy circuits for magnetic bubbles of diameter 1 μm and 2 μm. Patterns are defined by electron beam on an x-ray mask. X-ray lithography and ion milling are employed to replicate the pattern in Permalloy.

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electron beam

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