Growth Parameter Optimization And Interface Treatment For Enhanced Electron Mobility In Heavily Strained Gainas/Alinas High Electron Mobility Transistor Structures

The optimization of heavily strained Ga0.25In0.75As/Al0.48In0.52As high electron mobility transistor structures is discussed in detail. The growth parameters and the channel layer interfaces were optimized in order to maximize the mobility of the two-dimensional electron gas. Structures composed of an 11 nm thick channel layer and a 4 nm thick spacer layer exhibited electron mobilities as high as 15 100 cm(2)/Vs and 70 000 cm(2)/Vs at 300 and 77 K, respectively, for channels including InAs strained layers. The sheet carrier density was kept above 2.5 x 10(12) cm(-2) throughout the entire study. (C) 2014 AIP Publishing LLC.