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Electron Spin Resonance Study Of As-Deposited And Annealed (Hfo2)(X)(Sio2)(1-X) High-Kappa Dielectrics On Si

B B Triplett,Philip T Chen,Yoshio Nishi,Paul H Kasai,J J Chambers,Luigi Colombo

JOURNAL OF APPLIED PHYSICS（2007）

Cited 25|Views21
Key words
electron spin resonance,nitrogen,band structure,electron density,thin film,electron paramagnetic resonance
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