Simulation and Experimental Verification of Silicon Microgyroscope's Closed-Loop Driving Circuits Based on Cadence

The output-current of silicon microgyroscope is at the level of 10-7A, so the requirements for circuits’ SNR are very high. This paper conducts the simulation of closed-loop driving circuits in Cadence on the basis of a RLC series resonant circuit. It turns out that experimental results fit the simulation which has a great significance for improving the property of circuits. First of all, the operating principle of silicon microgyroscope is introduced. Secondly, a RLC series resonant circuit is established by measuring Q value and driving frequency. Then the overall simulation is conducted in Cadence combined with chips’ models offered by the manufacturers. Finally, the accuracy of simulation is verified by experiments. Experimental results show that, the relative error of driving sense signal’s value is 0.5%, for stability time the value is 0.6% and for driving frequency the value is 38ppm. Experimental results agree well with the simulation, which confirms simulation’s accuracy. This has a great significance for improving the property of circuits.