Measurement of Coercive Force Enhanced by Nanometer-Sizing of Magnetic Dot by X-Ray Magnetic Circular Dichroism (XMCD)

ADVANCED MICRO-DEVICE ENGINEERING III(2013)

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摘要
We have studied the coercive force of fine magnetic CoPt dot enhanced by nanometer-sizing of the dot. The 39- to 106-nm-sized CoPt magnetic dot arrays were formed by30-keV-electron beam (EB) drawing with thin calixarene resist and 200-eV-Ar ion milling. Using the fine magnetic dot arrays, we measured coercive forces of the dot by x-ray magnetic circular dichroism (XMCD) with an energy of 11.56 keV, which corresponds to an energy edge of Pt-L3. It is experimentally demonstrated that a coercive force of the nanometer-sized magnetic column increased as the dot diameter decreased.
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关键词
Coercive force,nano magnetic column,XMCD,magnetic storage,EB lithography
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