Properties of Metal Oxide Gas Sensors with Electrodes Placed below the Sensing Layer

In this work, we investigate the influence of position of electrodes on the sensitivity of hydrogen gas sensors based on TiO2 thin films. We have prepared two types of sensors with platinum comb-like electrodes deposited on top and under the TiO2 layer. Response of these sensors to hydrogen gas in the concentration range of 0-10 000 ppm at temperature of 350 degrees C has been studied. The sensors with electrodes placed under the TiO2 layer showed two orders of magnitude lower sensitivity for 10 000 ppm compared to sensors with electrodes on top of the layer, but it was considerably increased when thickness of the TiO2 layer was lowered. This gives a possibility to improve the sensitivity of gas sensors in which the electrodes must be placed below the sensing layer for their protection from harsh environment.