Stressed Silicon Nitride Nanomechanical Resonators at Helium Temperatures

We have characterized the mechanical resonance properties (both linear and nonlinear) of various doubly-clamped silicon nitride nanomechanical resonators, each with a different intrinsic tensile stress. The measurements were carried out at 4 K and the magnetomotive technique was used to drive and detect the motion of the beams. The resonant frequencies of the beams are in the megahertz range, with quality factors of the order of 10 4 . We also measure the dynamic range of the beams and their nonlinear (Duffing) behaviour.