Electrical Properties of Hydrogenated Microcrystalline Silicon Carbon Alloys: Effect of Deposition Parameters and Light Soaking
Journal of Physics D Applied Physics（2015）
关键词
silicon carbon alloys,methane,silicon tetrafluoride,RF-power,transport properties,light soaking
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要