Micro pH Sensors Based on Iridium Oxide Nanotubes

Iridium oxide (IrOx) nanotubes have been grown on microelectrodes utilizing a patterned nanoporous aluminum oxide (AAO) template to form a micro pH sensor. A layer of 900-nm thick aluminum sputtered on a silicon wafer was locally anodized at various voltages to investigate the morphology of the patterned AAO templates. The electrode position of IrOx inside the supportive AAO template was carried o...