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Defect Formation and Recrystallization Mechanisms in Silicon-on-sapphire Films under Ion Irradiation

A. A. Shemukhin,Y. V. Balakshin,V. S. Chernysh,S. A. Golubkov,N. N. Egorov, A. I. Sidorov

Semiconductors（2014）

Cited 30|Views10
Key words
Sapphire Substrate,Silicon Film,Implantation Dose,High Defect Density,Recrystallization Mechanism
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