Electrospray deposition and characterization of cobalt oxide thin films

Materials Science in Semiconductor Processing(2014)

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摘要
Cobalt oxide thin films were fabricated by means of electrospray deposition. The obtained films were characterized by Raman spectroscopy, X-ray diffraction and Scanning electron microscopy. The solution that was used gave the Co3O4 phase at different growth temperatures. The best granular surfaces were obtained at 250°C as verified by all characterization techniques, while flaky surfaces were obtained at higher temperatures. The surface morphology is mostly granular except for high temperatures where the cobalt oxide is formed as flakes instead of grains.
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关键词
Thin films,Electrospray deposition,Temperature effect
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