Design and Electro-Optical Characterization of Si-Based Resonant Cavity Light Emitting Devices

The fabrication and characterization of electrically pumped silicon/silicon dioxide (Si/SiO2) Fabry-Perot microcavities is reported. The active region of these devices consists of an Er-implanted silicon-rich oxide (SRO:Er) film placed in the center of a λ-cavity polysilicon spacer. The structures have been designed in order to enhance the electroluminescence signal at 1540 nm, which is an importa...