High-Temperature Electromechanical Characterization of AlN Single Crystals.

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control(2015)

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摘要
Hexagonal AlN is a non-ferroelectric material and does not have any phase transition up to its melting point (>2000°C), which indicates the potential use of AlN for high-temperature sensing. In this work, the elastic, dielectric, and piezoelectric constants of AlN single crystals were investigated at elevated temperatures up to 1000°C by the resonance method. We used resonators of five different m...
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关键词
Aluminum nitride,III-V semiconductor materials,Crystals,Temperature,Temperature measurement,Temperature sensors,Resonant frequency
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