Nanoparticle Sensing Utilizing Back Scattering Reflection Mode of an Integrated Micro-Resonator
Selected Topics in Quantum Electronics, IEEE Journal of（2016）
摘要
We have demonstrated an optical sensing device based on back scattering signal changes in the transfer functions of an integrated silicon-based optical resonator, which are induced by the presence of one or more nanoparticles in the resonator's evanescent field. The nanoparticles may be used as taggants to label other species to be detected. Our work offers several potential advantages to optical sensing, including improved detection limits, relaxed resonator fabrication requirements, CMOS compatibility and the use of simpler, lower cost optical sources and detectors.
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关键词
elemental semiconductors,integrated optoelectronics,light reflection,light scattering,micro-optomechanical devices,microfabrication,micromechanical resonators,microsensors,nanoparticles,nanophotonics,nanosensors,optical fabrication,optical resonators,optical sensors,silicon,CMOS compatibility,Integrated silicon-based optical resonator,Si,back scattering reflection mode,back scattering signal changes,detection limits,integrated microresonator,nanoparticle sensing,optical detectors,optical sensing device,optical sources,relaxed resonator fabrication,resonator evanescent field,transfer functions,Back scattering,Optical sensor,back scattering,integrated micro-resonator,optical sensor,silicon photonics
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