A resonnat accelerometer based on ring-down measurement

In this paper, a micromachined differential resonant accelerometer with electrostatic stiffness tuning is presented. The ring-down measurement is used for the first time to pick-up the real-time resonant frequencies of the accelerometer, which is more robust to device parameter variations and parasitic capacitances compared with the self-sustained oscillation based read-out. The total output drift over the temperature range of 120 °C for a single resonator and differential ones are 40.9 Hz and 1.0 Hz respectively, indicating a self-calibration capability of the differential configuration.