Surface acoustic wave ammonia sensor based on ZnO/SiO2 composite film.

Journal of Hazardous Materials(2015)

引用 102|浏览10
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摘要
•A surface acoustic wave ammonia sensor based on ZnO/SiO2 composite film.•The sensor demonstrates good sensitivity and selectivity to NH3.•The dangling Si bands on the surface of the film enhance the sensitivity to NH3.•The reactions on the surface of the film improve the sensor's selectivity to NH3.
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关键词
NH3 gas sensor,SAW,ZnO,SiO2,Composite film
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