Gan Nanowire Coated With Atomic Layer Deposition Of Tungsten: A Probe For Near-Field Scanning Microwave Microscopy

NANOTECHNOLOGY(2014)

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摘要
GaN nanowires were coated with tungsten by means of atomic layer deposition. These structures were then adapted as probe tips for near-field scanning microwave microscopy. These probes displayed a capacitive resolution of similar to 0.03 fF, which surpasses that of a commercial Pt tip. Upon imaging of MoS2 sheets with both the Pt and GaN nanowire tips, we found that the nanowire tips were comparatively immune to surface contamination and far more durable than their Pt counterparts.
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关键词
atomic layer deposition,gallium nitride,molybdenum disulphide,nanowires,scanning microwave microscopy,tungsten
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